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[ Goal | Publications | Presentations | Video | Reports | Patents]
Develop world-class advanced control and positioning systems for nano-scale measurements, assembly and standards. This includes arrays of high-precision micro-scale nanopositioning stages for scanning probe microscopy and nanomanipulation using MEMS technology; automated assembly of micro- and nano-scale components; and multi-degree-of-freedom nanometer-resolution fiber optic displacement sensors.
Gorman, J., Kim, Y-S., Vladar, A.E., Dagalakis, N.G., "Design of an On-Chip Micro-Scale Nanoassembly System," Proceedings of the International Symposium on Nanomanufacturing, 2006. Gorman,
J., Kim, Y-S., Dagalakis, N.G., "Control
of MEMS Nanopositioners with Nano-Scale Resolution," Proceedings
of the ASME International Mechanical Engineering Conference and Exhibition,
2006. J. J. Gorman and N. G. Dagalakis, "Probe-based micro-scale manipulation and assembly using force feedback," International Conference on Robotics and Remote Systems for Hazardous Environments, Salt Lake City, UT, 2006, pp. 621-628. S. Bérgna, J. J. Gorman, and N. G. Dagalakis, "Design and modeling of thermally actuated MEMS nanopositioners," ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, 2005, IMECE2005-82158. B. H. Kang, J. T.-Y. Wen, N. G. Dagalakis, and J. J. Gorman, "Analysis and design of parallel mechanisms with flexure joints," IEEE Transactions on Robotics, vol. 21, pp. 1179-1185, 2005. B. H. Kang, J. T.-Y. Wen, N. G. Dagalakis, and J. J. Gorman, "Design optimization for a parallel MEMS mechanism with flexure joints," ASME Design Engineering Technical Conferences, Salt Lake City, UT, 2004, DETC2004/MECH-57455. B. H. Kang, J. T.-Y. Wen, N. G. Dagalakis, and J. J. Gorman, "Analysis and design of parallel mechanisms with flexure joints," IEEE International Conference on Robotics and Automation, New Orleans, LA, 2004, pp. 4097-4102. J. J. Gorman and N. G. Dagalakis, "Force control of linear motor stages for microassembly," ASME International Mechanical Engineering Congress and Exposition, Washington, DC, 2003, IMECE2003-42079. J. J. Gorman and N. G. Dagalakis, "Modeling and disturbance rejection control of a nanopositioner with application to beam steering," ASME International Mechanical Engineering Congress and Exposition, Washington, DC, 2003, IMECE2003-41603. J. J. Gorman, N. G. Dagalakis, and B. G. Boone, "Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering," Free Space Laser Communication and Active Illumination III, SPIE Vol. 5160, pp. 170-181, 2003. K. B. Fielhauer, B. G. Boone, J. R. Bruzzi, B. E. Kluga, J. R. Connelly, M. M. Bierbaum, J. J. Gorman, and N. Dagalakis, "Comparison of macro-tip/tilt and meso-scale position beam steering transducers for free-space optical communications using a quadrant photodiode sensor," Free Space Laser Communication and Active Illumination III, SPIE Vol. 5160, pp. 192-203, 2003. N. G. Dagalakis, T. LeBrun, and J. Lippiatt, "Micro-mirror array control of optical tweezer trapping beams," Proceedings of the IEEE Conference on Nanotechnology, Washington, DC, 2002, pp. 177-180. B. G. Boone, R. S. Bokulic, G. B. Andrews, R. L. McNutt Jr., and N. Dagalakis, "Optical and microwave communications system conceptual design for a realistic interstellar explorer," Free-Space Laser Communication and Laser Imaging II, SPIE Vol. 4821, pp. 225-236, 2002. N. G. Dagalakis, J. A. Kramar, E. Amatucci, and R. Bunch, "Kinematic modeling and analysis of a planar micro-positioner," Proceedings of the ASPE Annual Meeting, Crystal City, VA, 2001, pp. 135-138. N. G. Dagalakis and E. Amatucci, "Kinematic modeling of a 6 degree of freedom tri-stage micro-positioner," Proceedings of the ASPE Annual Meeting, Crystal City, VA, 2001, pp. 200-203. MEMS Nanopositioning Mechanisms: Design and Experimental Characterization, MEMS Alliance Symposium April 19, 2005. The NIST Dual Parallel Cantilever MEMS Scale Micro Positioner, November 29, 2004. Performance
Evaluation of a Parallel Cantilever Biaxial Micropositioning Stage High-Performance
Micropositioners for Opto-Electronic Manufacturing An
Overview of Nano/Micro/Meso Scale Manufacturing at NIST Meso/Micro/Nano
Scale Technologies at NIST Visiting
Committe Presentation Watch the "Z-Axis Actuator Motion" Video Watch the "Open Loop Control of a 1 DOF MEMS Nanopositioner" Video. Watch the "2DOF MEMS Nanopositioner" Video. NIST/MEL_Dual Parallel Cantilever MEMS Scale Micro Positioner (avi file) Calibration of a Force Feedback Joystick Final Report on Micro-Meso Scale Manufacturing Exploratory Project Held
on March 11 - 12, 1999 Manufacturing Three-Dimensional Components and Devices at the Meso and Micro Scales Workshop Co-sponsored
by the National Institute of Standards and Technology and the National
Science Foundation Calibration
of an Optical Sensor US Measurement System Need Top
Down Micro/Nano Manufacturing Six-Degree of Freedom Micro-Positioner Patent isd-webmaster@cme.nist.gov |
